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Industrial Automation

Industrial Automation

ZS Series

Smart Sensor 2D Measurement Type

ZS Series

A Lineup for Ultra-high-precision Displacement Measurements That Take Smart Sensors into a New Realm

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English

Global Edition

Please note some product models not sold in Thailand may be included in the following manual(s) for our global customers.

*It is recommended to select “Save” from the right-click due to large size of manual PDF data.

*The manual which name begins with "Instruction Sheet" is a simplified manual supplied with the product.

Type Manual Name Catalog Number
[size]
Last Update
Manual ZS-CRT
Sensor Communications Unit for Smart Sensors User's Manual
Z277-E1-01
[621KB]
Mar 29, 2013
20130329
0010 030_Manual ZS-CRT Sensor Communications Unit for Smart Sensors User's Manual
Manual ZS-DSU (Ver 2.0)
Smart Sensor (Data Storage Unit) User's Manual
Z210-E1-04
[3655KB]
Jul 01, 2016
20160701
0010 030_Manual ZS-DSU (Ver 2.0) Smart Sensor (Data Storage Unit) User's Manual
Manual ZS-HL Series
Smart Sensor (2D CMOS Laser Type) User's Manual
Z236-E1-08
[5988KB]
Oct 01, 2019
20191001
0010 030_Manual ZS-HL Series Smart Sensor (2D CMOS Laser Type) User's Manual
Manual ZS-L Series (Ver 2.0)
Smart Sensor (2D CMOS Laser Type) User's Manual
Z208-E1-04
[4488KB]
May 07, 2018
20180507
0010 030_Manual ZS-L Series (Ver 2.0) Smart Sensor (2D CMOS Laser Type) User's Manual
Manual ZS-MDC (Ver 2.0)
Smart Sensor (Multi-Controller) User's Manual
Z209-E1-03
[3330KB]
Jan 12, 2016
20160112
0010 030_Manual ZS-MDC (Ver 2.0) Smart Sensor (Multi-Controller) User's Manual
Manual ZS Series
Smart Sensors Non-procedual Communication Command Reference
Z232-E1-02
[1072KB]
Mar 29, 2013
20130329
0010 030_Manual ZS Series Smart Sensors Non-procedual Communication Command Reference
Manual ZS Series
Smart Sensors CompoWay/F Communication Command Reference
Z231-E1-02
[1316KB]
Mar 29, 2013
20130329
0010 030_Manual ZS Series Smart Sensors CompoWay/F Communication Command Reference
Manual ZS-HL-N Series
Smart Sensors 2D CMOS Laser Type User's Manual
Z470-E1-01
[7851KB]
Dec 01, 2022
20221201
0010 030_Manual ZS-HL-N Series Smart Sensors 2D CMOS Laser Type User's Manual
Manual ZS-HL-N
Series Smart Sensors CompoWay/F Communication Command Reference User's Manual
Z471-E1-01
[1603KB]
Dec 01, 2022
20221201
0010 030_Manual ZS-HL-N Series Smart Sensors CompoWay/F Communication Command Reference User's Manual
Manual ZS-HL-N
Series Smart Sensors Non-procedual Communication Command Reference User's Manual
Z472-E1-01
[1799KB]
Dec 01, 2022
20221201
0010 030_Manual ZS-HL-N Series Smart Sensors Non-procedual Communication Command Reference User's Manual
Instruction Manual ZG-RPD[][]
Smart Sensors Real-time Parallel Output Unit Instruction Sheet (ENG/JPN)
9975150-3C
[968KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZG-RPD[][] Smart Sensors Real-time Parallel Output Unit Instruction Sheet (ENG/JPN)
Instruction Manual ZG-RPD[][]-N
Smart Sensors Real-time Parallel Output Unit Instruction Sheet (ENG/JPN)
3605686-4A
[529KB]
Jun 08, 2020
20200608
0030 031_Instruction Manual ZG-RPD[][]-N Smart Sensors Real-time Parallel Output Unit Instruction Sheet (ENG/JPN)
Instruction Manual ZS-CRT
Sensor Communication Unit for Smart Sensors Instruction Sheet (ENG/JPN)
2775424-9C
[962KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-CRT Sensor Communication Unit for Smart Sensors Instruction Sheet (ENG/JPN)
Instruction Manual ZS-DSU[][]
Smart Sensors Data Storage Unit Instruction Sheet (ENG/JPN)
7934186-4G
[1016KB]
Sep 15, 2016
20160915
0030 031_Instruction Manual ZS-DSU[][] Smart Sensors Data Storage Unit Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDC[][]
Smart Sensor Sensor Controller for ZS-HLD[][][] Instruction Sheet (ENG/JPN)
7978908-3G
[789KB]
Dec 01, 2017
20171201
0030 031_Instruction Manual ZS-HLDC[][] Smart Sensor Sensor Controller for ZS-HLD[][][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDS2(T)
Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
7994381-3F
[659KB]
Oct 07, 2015
20151007
0030 031_Instruction Manual ZS-HLDS2(T) Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDC[][]-N
Smart Sensor Sensor Controller Instruction Sheet
5727458-6A
[1274KB]
Dec 01, 2022
20221201
0030 031_Instruction Manual ZS-HLDC[][]-N Smart Sensor Sensor Controller Instruction Sheet
Instruction Manual ZS-HLDS2V(T)
Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
3705886-0H
[1720KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-HLDS2V(T) Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDS3S(T)
Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
9900659-0A
[921KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-HLDS3S(T) Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDS5(T)
Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
7979296-3H
[6835KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-HLDS5(T) Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDS10
Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
7978887-7H
[6448KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-HLDS10 Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDS12AF(T)
Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
2204001-9A
[926KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-HLDS12AF(T) Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDS14AF(T)
Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
5316936-2D
[2918KB]
Mar 13, 2023
20230313
0030 031_Instruction Manual ZS-HLDS14AF(T) Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDS32
Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
1668764-7C
[843KB]
Oct 07, 2015
20151007
0030 031_Instruction Manual ZS-HLDS32 Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDS60/HLDS150
Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
7979326-9H
[3036KB]
Mar 13, 2023
20230313
0030 031_Instruction Manual ZS-HLDS60/HLDS150 Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-HLDS87
Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
1637654-4C
[897KB]
Oct 07, 2015
20151007
0030 031_Instruction Manual ZS-HLDS87 Sensor Head for Smart Sensor ZS-HLDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD[][]
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
7904810-5K
[2515KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD[][] Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD6GS(T)
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
4000572-7H
[6270KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD6GS(T) Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD10(T)
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
7986038-1A
[924KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-LD10(T) Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD10G(T)
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
7974133-1F
[1522KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD10G(T) Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD15G/LD15GT
Sensor Head for ZS-LDC[][] Smart Sensor Instruction Sheet (ENG/JPN)
7974132-3G
[1520KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD15G/LD15GT Sensor Head for ZS-LDC[][] Smart Sensor Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD20/LD40
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
7934361-1H
[2450KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD20/LD40 Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD20S(T)
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
7974131-5H
[2459KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD20S(T) Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD20T/LD40T
Sensor Head for ZS-LDC[][] Smart Sensor Instruction Sheet (ENG/JPN)
7949651-5F
[2400KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD20T/LD40T Sensor Head for ZS-LDC[][] Smart Sensor Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD35AF(T)
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
2748481-0C
[2911KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD35AF(T) Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD40-N
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
9975198-8C
[1257KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-LD40-N Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD50-1
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
4002525-6C
[1660KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD50-1 Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD50S
Sensor Head for ZS-LDC[][] Smart Sensor Instruction Sheet (ENG/JPN)
7974130-7H
[2458KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD50S Sensor Head for ZS-LDC[][] Smart Sensor Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD50SR
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
9472633-0B
[1110KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-LD50SR Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LD350S
Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
7974129-3H
[2459KB]
May 22, 2023
20230522
0030 031_Instruction Manual ZS-LD350S Sensor Head for Smart Sensor ZS-LDC[][] Instruction Sheet (ENG/JPN)
Instruction Manual ZS-LDC[][]
Smart Sensor for ZS-LD[][][] Sensor Controller Instruction Sheet (ENG/JPN)
7905056-8G
[18638KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-LDC[][] Smart Sensor for ZS-LD[][][] Sensor Controller Instruction Sheet (ENG/JPN)
Instruction Manual ZS-MDC[][]
Smart Sensor Multi-Controller Instruction Sheet (ENG/JPN)
7905059-2F
[19622KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-MDC[][] Smart Sensor Multi-Controller Instruction Sheet (ENG/JPN)
Instruction Manual ZS-RPD[][]
Smart Sensors Real-time Parallel Output Unit Instruction Sheet (ENG/JPN)
7964919-2D
[993KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-RPD[][] Smart Sensors Real-time Parallel Output Unit Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XC[]A
Extension Cable Instruction Sheet (ENG/JPN)
7905237-4C
[4056KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-XC[]A Extension Cable Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XC[]B(R)
Extension Cable Instruction Sheet (ENG/JPN)
7934255-0C
[4286KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-XC[]B(R) Extension Cable Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XC[][]CR
Smart Sensors Long-distance Extension Cable Instruction Sheet (ENG/JPN)
7994517-4B
[561KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-XC[][]CR Smart Sensors Long-distance Extension Cable Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XC02D
Smart Sensor Conversion Cable for Connecting Digital Equalizer to Sensor Controller Instruction Sheet (ENG/JPN)
7994516-6B
[527KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-XC02D Smart Sensor Conversion Cable for Connecting Digital Equalizer to Sensor Controller Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XC5BR-1
Extension Cable Instruction Sheet (ENG/JPN)
5322375-8A
[704KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-XC5BR-1 Extension Cable Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XCN
Controller Link Unit Instruction Sheet (ENG/JPN)
7905062-2C
[8214KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-XCN Controller Link Unit Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XEQ
Smart Sensor Digital Equalizer Instruction Sheet (ENG/JPN)
7979315-3C
[443KB]
Jul 15, 2014
20140715
0030 031_Instruction Manual ZS-XEQ Smart Sensor Digital Equalizer Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XPM1/XPM2
Panel Mount Adapter Instruction Sheet (ENG/JPN)
7905060-6C
[3534KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-XPM1/XPM2 Panel Mount Adapter Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XPT[]
RS-232C Cable for Connecting to a Programmable Controller/Programmable Terminal Instruction Sheet (ENG/JPN)
7949631-0D
[3814KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-XPT[] RS-232C Cable for Connecting to a Programmable Controller/Programmable Terminal Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XPT3
RS-232C Cable for Connecting to a Programmable Controller/Programmable Terminal Instruction Sheet (ENG/JPN)
3127638-6A
[381KB]
Jun 08, 2020
20200608
0030 031_Instruction Manual ZS-XPT3 RS-232C Cable for Connecting to a Programmable Controller/Programmable Terminal Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XRS[]
RS-232C Cable for Connecting to a Personal Computer Instruction Sheet (ENG/JPN)
7905061-4F
[2778KB]
Jul 02, 2015
20150702
0030 031_Instruction Manual ZS-XRS[] RS-232C Cable for Connecting to a Personal Computer Instruction Sheet (ENG/JPN)
Instruction Manual ZS-XRS3
RS-232C Cable for Connecting to a Personal Computer Instruction Sheet (ENG/JPN)
3125907-4A
[374KB]
Jun 08, 2020
20200608
0030 031_Instruction Manual ZS-XRS3 RS-232C Cable for Connecting to a Personal Computer Instruction Sheet (ENG/JPN)